魅影直播’s Quest Broadband Optical Monitor provides non-quarterwave control directly on production substrates. Multiple algorithm choices and selectable wavelength ranges allow control of leading-edge optical designs.

• Up to 10x improvement in layer thickness control compared to previous generations
• Increased production utilization through reduction in calibration runs
• Less than 0.1 percent repeatability even with non-consecutive runs
• Easy set-up with user-friendly interface
• Fully integrates into existing SPECTOR and SPECTOR-HT IBD systems

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魅影直播’s SPECTOR庐 Loadlock Ion Beam Sputtering System can provide substantial throughput improvements for a variety of applications. Capable of beginning deposition within five minutes of substrate loading, the SPECTOR Loadlock System can easily double throughput for designs in which the deposition time is shorter than the typical pre-process steps required of batch tools.

System repeatability is also enhanced through the ability to maintain steady state conditions for process parameters such as pressure, temperature, target surface composition and ion source power. SPECTOR Loadlock users can expect improved mean time between maintenance (MTBM) for components such as radio frequency neutralizers, chamber liners and shielding due to their less frequent exposure to atmosphere and moisture. Combined, these features and benefits enable users to manufacture the highest precision and quality films available on the market at a fraction of the cost.

• Substantial throughput increase for low/medium thickness coating applications
• Improved repeatability through inherently more stable process conditions
• Increased mean time between maintenance of several key components
• Improved particulate control

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SPECTOR Dual Ion Beam Sputtering System

• Interchangeable platform accommodates either planetary, simple rotation or flip fixtures
• Offers high yields of 200, 100 and 50 GHz DWDM filters for telecom applications
• Meets stringent device specifications, such as narrow passband, wide stopband, steep slope and low insertion loss
• Produces AR coatings, complex non-quarter wave coatings and ultra-low-loss laser mirrors
• Fabricate mirrors with absorption and scatter at single-digit ppm levels
• High-energy process offers better packing density and low pin-hole density
• Low-pressure operation provides high film purity
• Superior film thickness control

SOURCERER System Manager featuring a unique graphical interface with real time and animated movements, the SOURCERER庐 system manager offers more control and flexibility than any other ion beam system control package on the market. Using simple commands or easily imported thin film designs, process engineers can develop advanced automated recipes, start the process runs and return when the run is complete. Coupled with 魅影直播’s superior process knowledge and responsive worldwide service organization, we set the standard both before and after the sale.

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魅影直播’s SPECTOR庐 Large Area Planetary Ion Beam Deposition System combines unsurpassed ion beam film quality with batch sizes near that of e-beam systems. In addition to a larger overall coating area, the robust fixture supports processing monolithic substrates up to 400mm in diameter and 100mm thick. 魅影直播 has included our 16cm RF high-power deposition source and ultra-low contamination RF neutralizers to ensure high deposition rates and film quality. For maximum stoichiometry control and in-situ substrate pre-cleaning or etch support, the system is also equipped with our 12cm RF assist ion source.

• Ion beam quality with industry-leading throughput provides the lowest cost of ownership
• Exceptional material uniformity across 400mm planets ensures maximum product yield
• High current RF ion sources provide excellent deposition rates
• Maximum product flexibility provided by large substrate and palette support

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